Specialty Electronic Gases (SEG)

Si2H6

Disilane 矽乙烷 (二矽烷)

CAS NO.1590-87-0


n-Si4H10

n-Tetrasilane 矽丁烷 (四矽烷)

CAS NO.7783-29-1


Si3H8

Trisilane 矽丙烷 (三矽烷)

CAS NO.7783-26-8


AHCl

Hydrogen Chloride Anhydrous 無水氯化氫

CAS NO.7647-01-0


NF3

Nitrogen Trifluoride 三氟化氮

CAS NO.7783-54-2


 

PH3

Phosphane 磷化氫 (Developed Product)

CAS NO.7803-51-2


B2H6

Diborane 乙硼烷 (Developed Product)

CAS NO.19287-45-7


AsH3

Arsine 砷化氫 (Developed Product)

CAS NO.7784-42-1


GeH4

Germane 甲鍺烷 (Developed Product)

CAS NO.7782-65-2


F2/N2 Mixtures

氟&氮混合氣 (Developed Product)

CAS NO.7782-41-4