Specialty Electronic Gases (SEG)
B2H6
Diborane 乙硼烷 (Developed Product)
CAS NO.19287-45-7
AsH3
Arsine 砷化氫 (Developed Product)
CAS NO.7784-42-1
GeH4
Germane 甲鍺烷 (Developed Product)
CAS NO.7782-65-2
F2/N2 Mixtures
氟&氮混合氣 (Developed Product)
CAS NO.7782-41-4