Specialty Electronic Gases (SEG)
Si2H6

Disilane 矽乙烷 (二矽烷)

CAS NO.1590-87-0
n-Si4H10

n-Tetrasilane 矽丁烷 (四矽烷)

CAS NO.7783-29-1
Si3H8

Trisilane 矽丙烷 (三矽烷)

CAS NO.7783-26-8
AHCl

Hydrogen Chloride Anhydrous 無水氯化氫
(Product planned for development)

CAS NO.7647-01-0
NF3

Nitrogen Trifluoride 三氟化氮
(Product planned for development)

CAS NO.7783-54-2

 

PH3

Phosphane 磷化氫
(Product planned for development)

CAS NO.7803-51-2

B2H6

Diborane 乙硼烷
(Product planned for development)

CAS NO.19287-45-7

AsH3

Arsine 砷化氫
(Product planned for development)

CAS NO.7784-42-1

GeH4

Germane 甲鍺烷
(Product planned for development)

CAS NO.7782-65-2

F2/N2 Mixtures

氟&氮混合氣
(Product planned for development)

CAS NO.7782-41-4